Amorphous Boron Nitride Dielectric
Sources:nanopure | Release date:
2018-10-06
| Browsing volume:
Key words:Amorphous Boron Nitride Dielectric
A nanoelectronics structure is disclosed which includes a substrate
layer which has least a first surface and also has a thickness of less
than 100 nm. The nanoelectronics structure also includes a dielectric
layer, which is deposited on the first surface of the substrate layer
and has a thickness of less than 100 nm. This dielectric layer is made
up of at least 90 mole percent amorphous boron nitride. Also disclosed
is a method for forming a dielectric layer on a substrate using pulsed
laser deposition.
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